A fully-integrated cantilever-based DNA detection SoC in a CMOS Bio-MEMS process

A highly-integrated DNA detection SoC, which includes DNA sensors, readout circuit, MCU, and OOK TX/RX, is implemented in a 0.35µm CMOS Bio-MEMS process. For low DNA concentration, an oscillator-based self-calibrated readout circuit with high sensitivity (2kHz/Ω) is proposed to convert small resistance variation of the piezoresistive cantilever sensor into adequate frequency shift. The measured results reveal that it could detect <0.02% of resistance variation (0.6Ω) and cover detection concentration range of specific DNA from 100pM to 1µM.

[1]  Ying-Zong Juang,et al.  Multiple type biosensors fabricated using the CMOS BioMEMS platform , 2010 .

[2]  T. Thundat,et al.  Bioassay of prostate-specific antigen (PSA) using microcantilevers , 2001, Nature Biotechnology.

[3]  Arjang Hassibi,et al.  A CMOS fluorescent-based biosensor microarray , 2009, 2009 IEEE International Solid-State Circuits Conference - Digest of Technical Papers.

[4]  Arjang Hassibi,et al.  A CMOS electrochemical impedance spectroscopy biosensor array for label-free biomolecular detection , 2010, 2010 IEEE International Solid-State Circuits Conference - (ISSCC).