论文信息 - On-Chip Microwave Filters on Standard Silicon Substrate Incorporating a Low-k BCB Dielectric Layer

On-Chip Microwave Filters on Standard Silicon Substrate Incorporating a Low-k BCB Dielectric Layer

A low-loss, low-pass microstrip transmission line based microwave filter using 6-¿m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.

Kevin J. Chen | P. Chan | L. Leung | X. Huo | K. J. Chen

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