Ion-Beam-Assisted Deposition and Synthesis

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[22]  U. Helmersson,et al.  Structure of reactively magnetron sputtered Hf‐N films , 1984 .

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[29]  D. Dobrev.  Ion-beam-induced texture formation in vacuum-condensed thin metal films☆ , 1982 .

[30]  H. Usui,et al.  Vaporized-metal cluster formation and effect of kinetic energy of ionized clusters on film formation , 1982 .

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[36]  D. W. Hoffman,et al.  Internal stresses in amorphous silicon films depositied by cylindrical magnetron sputtering using Ne, Ar, Kr, Xe, and Ar+H2 , 1981 .

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[45]  P. Martin,et al.  Ion-based methods for optical thin film deposition , 1986 .

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