论文信息 - Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation

Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation

We synthesized titanium nitride and titanium silicide layers on silicon by only one‐step multipulse laser irradiation of titanium‐coated silicon wafers in a jet of nitrogen, with characteristics appropriate for utilization in metallization schemes with very large scale integration devices.

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