Suppression of Outdiffusion in Titanium Diffused LiNbO3: A Review

This paper reviews the techniques which have been used to prevent or compensate for unwanted Li2 O outdiffusion from titanium diffused LiNbO3 waveguides. Techniques discussed include: control of Li2O partial pressure, magnesium codiffusion, diffusion in an atmosphere containing water vapor, control of diffusion temperature, choice of crystal stoichiometry, and furnace composition. The paper discusses the strengths and weaknesses of each method, and the range of fabrication conditions under which its use is appropriate.

[1]  R. Alferness,et al.  Polarization‐independent optical directional coupler switch using weighted coupling , 1979 .

[2]  Hiroshi Iwasaki,et al.  Optical properties in titanium‐diffused LiNbO3 strip waveguides , 1978 .

[3]  R. Smith,et al.  Correlation of Reduction in Optically Induced Refractive‐Index Inhomogeneity with OH Content in LiTaO3 and LiNbO3 , 1968 .

[4]  M. Fukuma,et al.  Phase matching temperature variation of second‐harmonic generation in Li out‐diffused LiNbO3 layers , 1980 .

[5]  J. L. Jackel,et al.  Elimination of out‐diffused surface guiding in titanium‐diffused LiNbO3 , 1981 .

[6]  W. Burns,et al.  Application of Li2O compensation techniques to Ti‐diffused LiNbO3 planar and channel waveguides , 1978 .

[7]  I. Kaminow,et al.  Metal‐diffused optical waveguides in LiNbO3 , 1974 .

[8]  A. Glass,et al.  Optical damage resistance of monovalent ion diffused LiNbO3 and LiTaO3 waveguides , 1981 .

[9]  S. Saito,et al.  Effect of Mg diffusion on Ti‐diffused LiNbO3 waveguides , 1978 .

[10]  A simple technique for suppressing Li2O out‐diffusion in Ti : LiNbO3 optical waveguide , 1977 .

[11]  T. Ranganath,et al.  Suppression of Li2O out‐diffusion from Ti‐diffused LiNbO3 optical waveguides , 1977 .

[12]  J. Revelli,et al.  Chemical control of optical damage in lithium niobate , 1978 .

[13]  R. Holman,et al.  Processing and properties of diffused lithium niobate planar optical waveguides , 1980 .

[14]  V. E. Wood,et al.  Stoichiometry dependence of lithium outdiffusion in LiNbO3 , 1981 .

[15]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[16]  Juichi Noda,et al.  Electro‐optic amplitude modulation using three‐dimensional LiNbO3 waveguide fabricated by TiO2 diffusion , 1975 .

[17]  A. C. Pastor,et al.  Elimination of Li2O out‐diffusion waveguide in LiNbO3 and LiTaO3 , 1977 .

[18]  John B. Shoven,et al.  I , Edinburgh Medical and Surgical Journal.

[19]  Closed‐tube control of out‐diffusion during fabrication of optical waveguides in LiNbO3 , 1978 .