论文信息 - Negative Ions in 13.56 MHz Discharge of SF6 Gas in a Planar Diode - 字舞流文

Negative Ions in 13.56 MHz Discharge of SF6 Gas in a Planar Diode

E. Nishimura | Yukinori Saito | I. Ishikawa | Shinji Suganomata Shinji Suganomata | K. Nagaseki