论文信息 - A comparison of graphite and AlN caps used for annealing ion-implanted SiC - 字舞流文

A comparison of graphite and AlN caps used for annealing ion-implanted SiC

O. W. Holland | R. Vispute | M. Wood | M. Ervin | T. Zheleva | M. Spencer | K. Jones | P. Shah | M. Derenge | K. Kirchner | C. Thomas | K. Jones