Design of a Multiple Folded-Beam Disk Resonator with High Quality Factor

This paper proposes a new multiple folded-beam disk resonator whose thermoelastic quality factor is significantly improved by appropriately reducing the beam width and introducing integral-designed lumped masses. The quality factor of the fabricated resonator with (100) single crystal silicon reaches 710 k, proving to be a record in silicon disk resonators. Meanwhile, a small initial frequency split of the order-3 working modes endows the resonator with great potential for microelectromechanical systems (MEMS) gyroscopes application. Moreover, the experimental quality factor of resonators with different beam widths and relevant temperature experiment indicate that the dominating damping mechanism of the multiple folded-beam disk resonator is no longer thermoelastic damping.

[1]  Xuezhong Wu,et al.  Radially Pleated Disk Resonator for Gyroscopic Application , 2021, Journal of Microelectromechanical Systems.

[2]  T. Kenny,et al.  Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope , 2021, Journal of Microelectromechanical Systems.

[3]  T. Kenny,et al.  A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F , 2021, 2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).

[4]  Xuezhong Wu,et al.  0.015 Degree-Per-Hour Honeycomb Disk Resonator Gyroscope , 2021, IEEE Sensors Journal.

[5]  Farrokh Ayazi,et al.  Monocrystalline Silicon Carbide Disk Resonators on Phononic Crystals with Ultra-Low Dissipation Bulk Acoustic Wave Modes , 2019, Scientific Reports.

[6]  D. Elata,et al.  Frequency Matching of Orthogonal Wineglass Modes in Disk and Ring Resonators Made From (100) Silicon , 2019, IEEE Sensors Letters.

[7]  Xuezhong Wu,et al.  0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s) , 2018, Microsystems & Nanoengineering.

[8]  Lei Yu,et al.  A Novel Sixteen-Sided Cobweb-Like Disk Resonator Gyroscope with Low As-Fabricated Frequency Split between Drive and Sense Modes , 2018, 2018 IEEE SENSORS.

[9]  O. Tabata,et al.  Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope , 2018, 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).

[10]  Xuezhong Wu,et al.  Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate , 2017 .

[11]  A. Shkel,et al.  Demonstration of 1 Million $Q$ -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction , 2015, Journal of Microelectromechanical Systems.

[12]  John Y. Liu,et al.  Boeing Disc Resonator Gyroscope , 2014, 2014 IEEE/ION Position, Location and Navigation Symposium - PLANS 2014.

[13]  Andrei M. Shkel,et al.  Quality Factor Maximization Through Dynamic Balancing of Tuning Fork Resonator , 2014, IEEE Sensors Journal.

[14]  K. Najafi,et al.  Fused-Silica Micro Birdbath Resonator Gyroscope ( $\mu$-BRG) , 2014, Journal of Microelectromechanical Systems.

[15]  S. A. Zotov,et al.  High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation , 2012, Journal of Microelectromechanical Systems.

[16]  S. A. Zotov,et al.  Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements , 2011, IEEE Sensors Journal.

[17]  T. Kenny,et al.  What is the Young's Modulus of Silicon? , 2010, Journal of Microelectromechanical Systems.

[18]  M. Weinberg,et al.  Energy loss in MEMS resonators and the impact on inertial and RF devices , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[19]  Chan-Shin Chou,et al.  In-plane free vibration of a single-crystal silicon ring , 2008 .

[20]  Woo-Tae Park,et al.  Impact of geometry on thermoelastic dissipation in micromechanical resonant beams , 2006, Journal of Microelectromechanical Systems.

[21]  Stewart McWilliam,et al.  A preliminary investigation of thermo-elastic damping in silicon rings , 2004 .

[22]  M. Roukes,et al.  Thermoelastic damping in micro- and nanomechanical systems , 1999, cond-mat/9909271.

[23]  Lv Zhi-qing,et al.  Coriolis Vibratory Gyros , 2004 .

[24]  Clarence Zener,et al.  Internal friction in solids , 1940 .