论文信息 - An overview of physical analysis of nanosize conductive path in ultrathin SiON and high-к gate dielectrics in nanoelectronic devices - 字舞流文

An overview of physical analysis of nanosize conductive path in ultrathin SiON and high-к gate dielectrics in nanoelectronic devices

Xing Wu | X. Wu | K. Pey | N. Raghavan | M. Bosman | Wenhu Liu | K. Shubhakar | W. H. Liu | X. Li | Xiang Li | Michel Bosman