论文信息 - Magnetic Microactuation Of Torsional Polysilicon Structures

Magnetic Microactuation Of Torsional Polysilicon Structures

A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 x 130 x l5 /spl mu/m/sup 3/ nickel-iron plate attached to a pair of 400 x 2.2 x 2.2 /spl mu/m/sup 3/ polysilicon torsional beams has been rotated more than 90/spl deg/ out of the plane of the wafer and actuated with a torque greater than 3.0 nN-m. The torsional flexure structure constrains motion to rotation about a single axis which can be an advantage for a number of microphotonic applications (e.g., beam chopping, scanning, and steering).

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