论文信息 - The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)

The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097) | NIST

The MEMS 5-in-1 Reference Material (RM) is a single test chip with test structures from which material and dimensional properties are obtained using five documentary standard test methods (from which its name is derived). Companies can validate their use of the documentary standard test methods by comparing their inhouse measurements taken on the RM with the National Institute of Standards and Technology (NIST) measurements taken on the same test structures.

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[4] D. G. Seiler,et al. The MEMS 5-in-1 Reference Materials (RM 8096 and 8097) , 2012, 2012 IEEE International Conference on Microelectronic Test Structures.