Measurement of Phase Difference for Micromachined Gyros Driven by Rotating Aircraft

This paper presents an approach for realizing a phase difference measurement of a new gyro. A silicon micromachined gyro was mounted on rotating aircraft for aircraft attitude control. Aircraft spin drives the silicon pendulum of a gyro rotating at a high speed so that it can sense the transverse angular velocity of the rotating aircraft based on the gyroscopic precession principle when the aircraft has transverse rotation. In applications of the rotating aircraft single channel control system, such as damping in the attitude stabilization loop, the gyro signal must be kept in sync with the control signal. Therefore, the phase difference between both signals needs to be measured accurately. Considering that phase difference is mainly produced by both the micromachined part and the signal conditioning circuit, a mathematical model has been established and analyzed to determine the gyro's phase frequency characteristics. On the basis of theoretical analysis, a dynamic simulation has been done for a case where the spin frequency is 15 Hz. Experimental results with the proposed measurement method applied to a silicon micromachined gyro driven by a rotating aircraft demonstrate that it is effective in practical applications. Measured curve and numerical analysis of phase frequency characteristic are in accordance, and the error between measurement and simulation is only 5.3%.

[1]  P. Rombouts,et al.  A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback , 2009, IEEE Sensors Journal.

[2]  Prabir Bhattacharya,et al.  An Enhanced MEMS Error Modeling Approach Based on Nu-Support Vector Regression , 2012, Sensors.

[3]  Liqiang Xie,et al.  A ${\rm Z}$-Axis Quartz Tuning Fork Micromachined Gyroscope Based on Shear Stress Detection , 2012, IEEE Sensors Journal.

[4]  Wei Wang,et al.  Design of a Novel MEMS Gyroscope Array , 2013, Sensors.

[5]  Andrei M. Shkel,et al.  MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness (MEMS Reference Shelf) , 2008 .

[6]  Kan Liu,et al.  Portable air defence missile system reliability analysis and design , 2012, 2012 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering.

[7]  P. Savage.  Strapdown Sculling Algorithm Design for Sensor Dynamic Amplitude And Phase-Shift Error , 2012 .

[8]  Yong Feng Ren,et al.  Research on Testing Method of Dynamic Characteristic for MEMS-Gyroscope , 2011 .

[9]  Yan Yuhui.  Research on the Dynamic Characteristics of Laser Gyroscope(Part One) , 2012 .

[10]  Y. Mochida,et al.  A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes , 2000 .

[11]  Linda Vahala,et al.  Numerical models and experimental investigation of energy loss mechanisms in SOI-based tuning-fork gyroscopes , 2009 .

[12]  Tao Wang,et al.  Denoising Simulation Study for MEMS Gyro Dynamic Running , 2012 .

[13]  Fuxue Zhang,et al.  The Research of Vibration Suppression Method for Silicon Micro-machined Gyro Driven by the Rotation Aircraft , 2012, EMEIT 2012.

[14]  Zhang Nang.  Silicon Micromachined Gyro Driving by Angular Rate of the Rotating Substrate , 2005 .

[15]  Antonio Barrientos,et al.  Improving Planetary Rover Attitude Estimation via MEMS Sensor Characterization , 2012, Sensors.

[16]  Sungsu Park.  Adaptive Control of a Vibratory Angle Measuring Gyroscope , 2010, Sensors.

[17]  Y. Mochida,et al.  A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes , 2000, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).