论文信息 - VUV diagnostic of the plasma of an ECR ion source

VUV diagnostic of the plasma of an ECR ion source

Spectroscopic investigation in the 18-160 nm spectral range of the plasma generated by a 10 GHz electron cyclotron resonance (ECR) ion source has been realised. Preliminary results are based on oxygen. O V line intensity ratios measurements inside the plasma are investigated as a function of the RF power and of the oxygen density injected in the main chamber of the source. Results are correlated with the extracted O4+ current. An electronic density of 1011 e-/cm3 and an electronic temperature of 30 eV have been derived from the computed results of Kato et al. (1990).

D. Hitz | M. Druetta

[1] C. Barué,et al. Hot electron studies in the Minimafios ECR ion source , 1992 .

[2] D. Smith,et al. Confinement of multiply charged ions in an electron cyclotron resonance heated mirror plasma , 1991 .

[3] E. Salzborn,et al. VUV spectroscopy for plasma diagnostics of an ECR ion source , 1990 .

[4] M. Druetta,et al. Sensitivity calibration of a VUV spectrometer using cross section measurements , 1989 .

[5] L. K. Huang,et al. A comparison of the C III, O V, F VI, and Ne VII Delta n = 0 (2-2) line emissions from a laboratory plasma with theoretical predictions and astrophysical observations , 1987 .

[6] F. Bourg,et al. Source d'ions lourds multicharges caprice 10 GHz pour tous les elements metalliques et Gazeux , 1987 .