Polycrystalline Ge Nanosheets Embedded in Metal‐Semiconductor Heterostructures Enabling Wafer‐Scale 3D Integration of Ge Nanodevices with Self‐Aligned Al Contacts
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J. Michler | P. Schweizer | W. Weber | X. Maeder | A. Lugstein | M. Sistani | R. Böckle | L. Wind | Kilian Eysin