Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

Advances in the field of micro electro mechanical systems and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free chem-sensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of MCL sensors.

[1]  G. Abadal,et al.  Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit , 2005, Journal of Microelectromechanical Systems.

[2]  Thomas Thundat,et al.  RESONANCE RESPONSE OF SCANNING FORCE MICROSCOPY CANTILEVERS , 1994 .

[3]  Xiangcheng Chu,et al.  Preparation and characterization of sol-gel derived (100)-textured Pb(Zr, Ti)O3 thin films: PbO seeding role in the formation of preferential orientation , 2004 .

[4]  Jaume Esteve,et al.  Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography , 2004 .

[5]  Jaume Esteve,et al.  Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry , 2003 .

[6]  Shih-Ming Yang,et al.  Development of a double-microcantilever for surface stress measurement in microsensors , 2007 .

[7]  G. Stoney.  The Tension of Metallic Films Deposited by Electrolysis , 1909 .

[8]  윤경구,et al.  Pulsed laser deposition of crystalline PZT thin films , 1999 .

[9]  T. Mihara,et al.  Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target , 2002 .

[10]  G. Abadal,et al.  A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: sensor calibration and glycerine evaporation rate measurement. , 2006, Ultramicroscopy.

[11]  Xinxin Li,et al.  A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals , 2006 .

[12]  T. Cui,et al.  Deposition and characterization of Pb(Zr,Ti)O3 sol–gel thin films for piezoelectric cantilever beams , 2007 .

[13]  M. S. Hegde,et al.  Ferroelectric properties of PbTiO3 , 1962 .

[14]  Gwo-Bin Lee,et al.  Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation , 2003 .

[15]  Fabrication and characterization of piezoelectric cantilever for micro transducers , 2006 .

[16]  Wei Wang,et al.  Design of High-Sensitivity Cantilever and Its Monolithic Integration With CMOS Circuits , 2007, IEEE Sensors Journal.

[17]  Jing Wang,et al.  Measurement on the actuating and sensing capability of a PZT microcantilever , 2007 .

[18]  L. E. Cross,et al.  Thickness-dependent electrical characteristics of lead zirconate titanate thin films , 1995 .

[19]  Michael S.-C. Lu,et al.  CMOS micromachined capacitive cantilevers for mass sensing , 2006 .

[20]  Fumihito Arai,et al.  Structure design of micro touch sensor array , 2003 .

[21]  James K. Gimzewski,et al.  Observation of a chemical reaction using a micromechanical sensor , 1994 .

[22]  Robert Barrett,et al.  Atomic force microscopy using a piezoresistive cantilever , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[23]  Wan Y. Shih,et al.  Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers , 2002 .

[24]  Takashi Izumi,et al.  Femtogram Mass Biosensor Using Self-Sensing Cantilever for Allergy Check , 2006 .

[25]  H. Kokawa,et al.  Effect of bottom electrodes on microstructures and electrical properties of sol-gel derived Pb(Zr0.53 Ti0.47)O3 thin films , 2002 .

[26]  G. Abadal,et al.  A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: electromechanical model and parameter extraction. , 2006, Ultramicroscopy.

[27]  Raj Mutharasan,et al.  Escherichia coli O157:H7 detection limit of millimeter-sized PZT cantilever sensors is 700 cells/mL. , 2005, Analytical sciences : the international journal of the Japan Society for Analytical Chemistry.

[28]  Hai-Feng Ji,et al.  Simulation of SiO2-based piezoresistive microcantilevers , 2006 .

[29]  O. Brand,et al.  Cantilever sensor with stress-concentrating piezoresistor design , 2005, IEEE Sensors, 2005..

[30]  Chengkuo Lee,et al.  Sol-gel derived PZT force sensor for scanning force microscopy , 1996 .