In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films
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T. Bearda | J. Poortmans | I. Gordon | H. Ezzaouia | J. Szlufcik | Y. Abdulraheem | W. Dimassi | H. Meddeb
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T. Bearda | J. Poortmans | I. Gordon | H. Ezzaouia | J. Szlufcik | Y. Abdulraheem | W. Dimassi | H. Meddeb