Excimer laser use for microetching computer-generated holographic structures.

Excimer-laser microetching of a variety of materials is applied to the fabrication of surface-relief optical microstructures of arbitrary morphology, with particular emphasis on computer-generated holographic structures. High-definition, high-radiation-intensity selective laser ablative etching in conjunction with step-and-repeat (period) replication or raster (pixel) scanning is used. To support such developments, the characteristic etching properties of a wide range of solid materials, from metals to semiconductors and polymers, are studied. Optical-interconnect and generic object holograms are produced by means of this alternative one-step holographic information-recording method.

[1]  M Kufner,et al.  Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding. , 1993, Applied optics.

[2]  D. Bäuerle.  Chemical processing with lasers: Recent developments , 1988 .

[3]  Trevor J. Hall,et al.  A generalisation of the error diffusion method for binary computer generated hologram design , 1992 .

[4]  W H Lee,et al.  Binary computer-generated holograms. , 1979, Applied optics.

[5]  C C Guest,et al.  Iterative encoding of high-efficiency holograms for generation of spot arrays. , 1989, Optics letters.

[6]  S H Lee,et al.  Computer-generated holograms fabricated by direct write of positive electron-beam resist. , 1993, Optics letters.

[7]  Joseph E. Marchegiano,et al.  Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices , 1991, Other Conferences.

[9]  Gary J. Swanson,et al.  Diffractive optical elements for use in infrared systems , 1989 .

[10]  S. Mihailov,et al.  Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon. , 1993, Applied optics.

[11]  Modest M. Oprysko,et al.  Total internal reflection mirrors fabricated in polymeric optical waveguides via excimer laser ablation , 1991, Other Conferences.

[12]  Three-dimensional nanostructures by direct laser etching of Si , 1995 .

[13]  L. B. Lesem,et al.  The kinoform: a new wavefront reconstruction device , 1969 .

[14]  Hiroshi Ito,et al.  New phase-shifting mask with highly transparent SiO2 phase shifters , 1990, Advanced Lithography.

[15]  Berndt Kuhlow,et al.  Antireflection-coated diffractive optical elements fabricated by thin-film deposition , 1994 .

[16]  A. W. Lohmann,et al.  Computer-generated binary holograms , 1969 .

[17]  S. Babu,et al.  Excimer laser induced ablation of polyetheretherketone, polyimide, and polytetrafluoroethylene , 1992 .

[18]  Angus P. Andrews,et al.  Miniaturized micro-optical scanners , 1994 .

[19]  A Huang,et al.  Planar integration of free-space optical components. , 1989, Applied optics.

[20]  Y S Abu-Mostafa,et al.  Neural networks for computing , 1987 .

[21]  Michael T. Gale,et al.  Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists , 1994 .

[22]  M Larsson,et al.  Successive development optimization of resist kinoforms manufactured with direct-writing, electron-beam lithography. , 1994, Applied optics.

[23]  Michael Holz,et al.  Agile beam steering using binary optics microlens arrays , 1990 .

[24]  K. Jain,et al.  Excimer laser projection lithography. , 1984, Applied optics.

[25]  B. Luk’yanchuk,et al.  The role of excited species in UV-laser materials ablation , 1993 .

[26]  J. Hunn,et al.  Fabrication of single‐crystal diamond microcomponents , 1994 .

[27]  H. Dammann,et al.  High-efficiency in-line multiple imaging by means of multiple phase holograms , 1971 .

[28]  B. Luk’yanchuk,et al.  The role of excited species in UV-laser materials ablation , 1993 .

[29]  Shigeru Kobayashi,et al.  Optimization of gradient-index computer-generated hologram , 1990, Photonics West - Lasers and Applications in Science and Engineering.

[30]  Shiro Ogata,et al.  Laser-diode collimating light sources using micro-Fresnel lenses , 1994 .

[31]  Jan P. Allebach,et al.  Iterative Approaches To Computer-Generated Holography , 1989 .

[32]  Marc A. Stiller.  Excimer laser fabrication of waveguide devices , 1991, Other Conferences.

[33]  Steven M. Arnold,et al.  Electron Beam Fabrication Of Computer-Generated Holograms , 1985 .

[34]  Erich Spitz,et al.  Photolithographic fabrication of thin film lenses , 1972 .

[35]  Burn Jeng Lin,et al.  Ultrafast high-resolution contact lithography with excimer lasers , 1982 .

[36]  R E Kunz,et al.  Arrays of anamorphic phase-matched Fresnel elements for diode-to-fiber coupling. , 1995, Applied optics.

[37]  G. V. Uspleniev,et al.  Investigation of computer-generated diffractive beam shapers for flattening of single-modal CO(2) laser beams. , 1995, Applied optics.

[38]  Stavros Pissadakis,et al.  Computer-generated holographic diffractive structures fabricated by direct excimer laser microetching , 1995, Photonics West.