论文信息 - Effect of implantation-parameters on the structural properties of Mg-ion implanted GaN - 字舞流文

Effect of implantation-parameters on the structural properties of Mg-ion implanted GaN

B. Rauschenbach | Chang Liu | A. Wenzel

[1] B. Mensching,et al. Characterization of Ca and C implanted GaN , 1997 .

[2] John C. Zolper,et al. Ion implantation doping and isolation of GaN , 1995 .