Research and development of VUV optical coatings f or micro mirror a ppl ications

( Fraunhof er IO F , A l bert2Ei nstei n2S t r. 7 , D207745 J ena , Germ any) Abstract : This paper deal s wit h vacuum UV optical coatings fo r micro mirror applications. High reflecting low2st ress op2 tical coatings have been developed for t he next2generation of micro mechanical mirro r s. The optimized metal systems are applicable in t he VUV spect ral region and can be integrated in t he technology of MO EMS , such as spatial light modula2 to rs ( SL M) and micro scanning mirro r s.