Analysis of DC-Metal Contact RF MEMS Switch with Split Beam Structure for Wireless Application

This paper presents a design of low actuation voltage radio frequency (RF) micro-electromechanical system (MEMS) switch with its Electro-Mechanical and RF characteristics simulation, as well as its virtual fabrication process. The RF MEMS switch employs a series metal contact switch on a coplanar waveguide (CPW) transmission line. The proposed switch is a single meander cantilever beam with split beam structure. The developed RF-MEMS switch has a very low Pull-in voltage of 5V and the maximum Mises stress under actuated condition is 22.8344 MPa. Its insertion loss and isolation is of -0.276 dB to -0.82 db and -79.3 dB to -77.1 dB at 8 to 12 GHz respectively. A simple four-mask process with photo resist (PR-S1800) as sacrificial layer to release the membrane is proposed in the design; and a virtual fabricated device is simulated using IntelliFab v8.7@ software.