论文信息 - An Ion-Beam Apparatus for the Formation of Oxide Films by the Oxygen Ion Sputtering Technique - 字舞流文

An Ion-Beam Apparatus for the Formation of Oxide Films by the Oxygen Ion Sputtering Technique

A. Stognij | N. Novitskii | S. D. Tushina | V. Svirin | T. M. Protazanova

[1] Leonard C. Feldman,et al. Fundamentals of Surface and Thin Film Analysis , 1986 .