Dynamic characteristics of ultra-precision aerostatic bearings

With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.