Selecting of the Temperature Measurement Points for Positioning Platform with Large Trip and High Precision Thermally Induced Error Compensation Model

In the technology of thermal error compensation in positioning platform with large trip and high precision, selecting the temperature measurement points rationally is particular important for successfully establishing the model of compensation. The method uses simulation to track platform heat distribution and thermal deformation under various thermal conditions. Temperature variables are grouped by different surfaces of the platform. Then a degree of grey incidence from grey system theory is introduced to identify the key temperature measurement points of each surface. Through the experiment data of thermal stress coupling analysis on the platform, the degree of correlation between all temperature measurement points and thermal displacement can be solved. The key temperature measurement points are confirmed by the largest value of the degree of correlation of each surface.