论文信息 - Tutorial in clean room for microtechnology teaching: fabrication of an integrated humidity sensor - 字舞流文

Tutorial in clean room for microtechnology teaching: fabrication of an integrated humidity sensor

Olivier Bonnaud | Hervé Lhermite | Nathalie Coulon | Anne-Claire Salaün | H. Lhermite | O. Bonnaud | N. Coulon | A. Salaün

[1] Olivier Bonnaud,et al. The French microelectronics training network supported by industry and education ministries , 1997, Proceedings of International Conference on Microelectronic Systems Education.