Characterization of Ta and TaN diffusion barriers beneath Cu layers using picosecond ultrasonics.
暂无分享,去创建一个
[1] D. Lynch,et al. Handbook of Optical Constants of Solids , 1985 .
[2] T. Qiu,et al. Short-pulse laser heating on metals , 1992 .
[3] O. Wright,et al. Ultrafast generation of acoustic waves in copper , 1995, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[4] J. Güdde,et al. Electron and lattice dynamics following optical excitation of metals , 2000 .
[5] Jacqueline Vollmann,et al. Sensitivity improvement of a pump-probe set-up for thin film and microstructure metrology. , 2002, Ultrasonics.
[6] Jacqueline Vollmann,et al. Measurement and simulation of the laser-based thermo-elastic excitation and propagation of acoustic pulses for thin film and MEMS inspection , 2002, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.
[7] Maris,et al. Electron diffusion in metals studied by picosecond ultrasonics. , 1994, Physical review. B, Condensed matter.
[8] J. Tauc,et al. Picosecond acoustics as a non-destructive tool for the characterization of very thin films , 1987 .
[9] Dieter M. Profunser,et al. Laserbased ultrasound for characterization of thin films and microstructures and resulting applications , 2004 .
[10] Thomsen,et al. Surface generation and detection of phonons by picosecond light pulses. , 1986, Physical review. B, Condensed matter.