23.3: Invited Paper: Upgrading Self‐Aligned Imprint Lithography (SAIL) in Preparation for Roll‐to‐Roll Manufacturing of Large‐Sized High‐Performance Flexible Electronics

Self-aligned imprint lithography (SAIL) is currently being upgraded to a next stage to better address the needs for roll-to-roll compatible manufacturing of large-sized flexible OLED display backplanes. Cu and oxide semiconductors are preferred choices of materials, and control of process and yield becomes even more important an issue.