论文信息 - Comparative study of anneal-induced modifications of amorphous carbon films deposited by dc magnetron sputtering at different argon plasma pressures - 字舞流文

Comparative study of anneal-induced modifications of amorphous carbon films deposited by dc magnetron sputtering at different argon plasma pressures

Yip-Wah Chung | G. Mariotto | R. Prioli | L. G. Jacobsohn | F. Freire | M. Lacerda | Y. Chung