Spherical-Aberration Correction of an Electron Lens by Holography

Electron image holograms of a crystalline fine particle are made with a field emission electron microscope. The spherical aberration of the electron lens is corrected in the optical reconstruction stage, using an optical lens as a compensator. Lattice images separated from the particle in the exactly focused electron microscopic image are formed inside the particle in the spherically corrected image and give correct information on the crystal lattice of the gold particle.