AlN-based flexible piezoelectric skin for energy harvesting from human motion

In this work we report on the development of a flexible energy harvester based on piezoelectric Aluminum Nitride (AlN) thin film able to scavenge electrical energy from human motion at very low frequencies. Flexible devices integrating thin films with controlled residual stress have been realized on polyimide substrate to obtain a pre-stressed structure (PSS). These devices show an enhancement of the generated output voltage, if compared to a flat-shape structure, when subjected to a deformation: the piezoelectric skin undergoing folding /unfolding states exhibits fast snapping transitions due to the buckling effect, which increases the mechanical stress of the piezoelectric structure, improving the generated output voltage.Experimental results demonstrate a maximum peak-to-peak voltage of 0.7V for a PSS, about six times higher than the corresponding voltage obtained for flat structures. These results have been validated by Finite Element Method (FEM) simulations of the total elastic energy of deformation and the mechanical stress versus the deformation, demonstrating the buckling effect. Display Omitted Flexible AlN-based energy harvester scavenging electric energy from human motion is developedPiezoelectric skin integrates a pre-stressed structure (PSS) improving the generation of output voltageThe increase of generated voltage is attributed to fast snapping transition during the skin deformation (buckling effect) of the PSSThe experimental results are validated by FEM simulations demonstrating the buckling effect

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