论文信息 - Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers - 字舞流文

Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers

U. Kleineberg | U. Heinzmann | E. Majková | D. Meyners | K. Rott | J. Hartwich | M. Sundermann | M. Grunze