Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

Recent developments in optical biosensors based on integrated photonic devices are reviewed with a special emphasis on silicon-on-insulator ring resonators. The review is mainly devoted to the following aspects: (1) Principles of sensing mechanism, (2) sensor design, (3) biofunctionalization procedures for specific molecule detection and (4) system integration and measurement set-ups. The inherent challenges of implementing photonics-based biosensors to meet specific requirements of applications in medicine, food analysis, and environmental monitoring are discussed.

[1]  Shekhar Bhansali,et al.  Rapid Detection of Infectious Envelope Proteins by Magnetoplasmonic Toroidal Metasensors. , 2017, ACS sensors.

[2]  M. Kaynak,et al.  0.13-μm SiGe BiCMOS technology with More-than-Moore modules , 2017, 2017 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM).

[3]  Jian-Jun He,et al.  Cascaded silicon-on-insulator double-ring sensors operating in high-sensitivity transverse-magnetic mode. , 2013, Optics letters.

[4]  Winnie N. Ye,et al.  Monolithic integration of SOI waveguide photodetectors and transimpedance amplifiers , 2018, OPTO.

[5]  A. Delage,et al.  Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding. , 2008, Optics express.

[6]  P. Steglich.  Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing , 2018, Emerging Waveguide Technology.

[7]  Lukas Chrostowski,et al.  Silicon photonic resonator sensors and devices , 2012, LASE.

[8]  Sarah Uvin,et al.  Integration of etched facet, electrically pumped, C-band Fabry-Pérot lasers on a silicon photonic integrated circuit by transfer printing. , 2018, Optics express.

[9]  M. Kaynak,et al.  Development of a Multi-project Fan-Out Wafer Level Packaging Platform , 2017, 2017 IEEE 67th Electronic Components and Technology Conference (ECTC).

[10]  P. Bienstman,et al.  Improving the detection limit of conformational analysis by utilizing a dual polarization Vernier cascade. , 2016, Optics express.

[11]  Xiaowei Guan,et al.  Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer. , 2016, Optics express.

[12]  Melinda S. McClellan,et al.  Label-free virus detection using silicon photonic microring resonators. , 2012, Biosensors & bioelectronics.

[13]  Y. Enami,et al.  A Novel Optical Biosensing System Using Mach–Zehnder-Type Optical Waveguide for Influenza Virus Detection , 2016, Applied Biochemistry and Biotechnology.

[14]  Lin Li,et al.  CMOS Electrochemical Instrumentation for Biosensor Microsystems: A Review , 2016, Sensors.

[15]  Use of silicon photonics wavelength multiplexing techniques for fast parallel readout in high energy physics , 2019, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.

[16]  Quadratic electro-optic effect in silicon-organic hybrid slot-waveguides. , 2018, Optics letters.

[17]  B. M. A. Rahman,et al.  High-Sensitivity Polarization-Independent Biochemical Sensor Based on Silicon-on-Insulator Cross-Slot Waveguide , 2017, IEEE Journal of Selected Topics in Quantum Electronics.

[18]  Muzammil Iqbal,et al.  Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[19]  W. Bogaerts,et al.  Experimental characterization of a silicon photonic biosensor consisting of two cascaded ring resonators based on the Vernier-effect and introduction of a curve fitting method for an improved detection limit. , 2010, Optics express.

[20]  Lin Li,et al.  Epoxy Chip-in-Carrier Integration and Screen-Printed Metalization for Multichannel Microfluidic Lab-on-CMOS Microsystems , 2018, IEEE Transactions on Biomedical Circuits and Systems.

[21]  Adam L. Washburn,et al.  Sensitive on-chip detection of a protein biomarker in human serum and plasma over an extended dynamic range using silicon photonic microring resonators and sub-micron beads. , 2011, Lab on a chip.

[22]  C. V. Van Peteghem,et al.  Development of a portable field immunoassay for the detection of aflatoxin M1 in milk. , 1999, International journal of food microbiology.

[23]  P. Verheyen,et al.  -1 V bias 67 GHz bandwidth Si-contacted germanium waveguide p-i-n photodetector for optical links at 56 Gbps and beyond. , 2016, Optics express.

[24]  G. Masini,et al.  Improving CMOS-compatible Germanium photodetectors. , 2012, Optics express.

[25]  Jens H. Schmid,et al.  Roadmap on silicon photonics , 2016 .

[26]  Yonathan Dattner,et al.  System-level integration of active silicon photonic biosensors using Fan-Out Wafer-Level-Packaging for low cost and multiplexed point-of-care diagnostic testing , 2018, Sensors and Actuators B: Chemical.

[27]  P. Steglich,et al.  Quadratic electro-optical silicon-organic hybrid RF modulator in a photonic integrated circuit technology , 2018, 2018 IEEE International Electron Devices Meeting (IEDM).

[28]  Ranjeet Kumar,et al.  Demonstration of a 50 Gb/s all-silicon waveguide photodetector for photonic integration , 2018, 2018 Conference on Lasers and Electro-Optics (CLEO).

[29]  Ryan C Bailey,et al.  Biomolecular analysis with microring resonators: applications in multiplexed diagnostics and interaction screening. , 2013, Current opinion in chemical biology.

[30]  B. Lamontagne,et al.  Spiral-path high-sensitivity silicon photonic wire molecular sensor with temperature-independent response. , 2008, Optics letters.

[31]  Geert Morthier,et al.  Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser. , 2018, Optics express.

[32]  P. Bienstman,et al.  Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator , 2009, IEEE Photonics Journal.

[33]  D. Knoll,et al.  High-performance photonic BiCMOS process for the fabrication of high-bandwidth electronic-photonic integrated circuits , 2015, 2015 IEEE International Electron Devices Meeting (IEDM).

[34]  Jian-jun He,et al.  Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering. , 2018, Optics express.

[35]  Jian-Jun He,et al.  High-sensitivity and wide-range optical sensor based on three cascaded ring resonators. , 2017, Optics express.

[36]  Yoshiteru Amemiya,et al.  Detection of antibody-antigen reaction by silicon nitride slot-ring biosensors using protein G , 2016 .

[37]  Silvio Pulwer,et al.  Novel Ring Resonator Combining Strong Field Confinement With High Optical Quality Factor , 2015, IEEE Photonics Technology Letters.

[38]  L. Chrostowski,et al.  System-level integration of active silicon photonic biosensors , 2017, BiOS.

[39]  N. Vulliet,et al.  Recent progress in Silicon Photonics R&D and manufacturing on 300mm wafer platform , 2015, 2015 Optical Fiber Communications Conference and Exhibition (OFC).

[40]  W. Freude,et al.  Surface sensing with integrated optical waveguides: a design guideline. , 2018, Optics express.

[41]  P. Markaki,et al.  Occurrence of aflatoxin M1 in commercial pasteurized milk determined with ELISA and HPLC. , 1997, Food additives and contaminants.

[42]  Karen C. Cheung,et al.  Silicon Photonic Biosensors Using Label-Free Detection , 2018, Sensors.

[43]  Ramaier Narayanaswamy,et al.  Analysis of the performance of interferometry, surface plasmon resonance and luminescence as biosensors and chemosensors , 2006 .

[44]  Thomas Ferrotti,et al.  1310 nm hybrid InP/InGaAsP on silicon distributed feedback laser with high side-mode suppression ratio. , 2015, Optics express.

[45]  Lauris Kaplinski,et al.  Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators. , 2012, Biosensors & bioelectronics.

[46]  Alan Y. Liu,et al.  Heterogeneous Silicon Photonic Integrated Circuits , 2016, Journal of Lightwave Technology.

[47]  Geert Morthier,et al.  1.3 μm InAs/GaAs quantum dot DFB laser integrated on a Si waveguide circuit by means of adhesive die-to-wafer bonding. , 2018, Optics express.

[48]  D. Knoll,et al.  High bandwidth, high responsivity waveguide-coupled germanium p-i-n photodiode. , 2015, Optics express.

[49]  Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors , 2016 .

[50]  Ren Bo,et al.  Research progress of III–V laser bonding to Si , 2016 .

[51]  K. Petermann,et al.  Antifouling coatings on SOI microring resonators for bio sensing applications , 2016 .

[52]  R. Bailey,et al.  Single domain antibodies for the detection of ricin using silicon photonic microring resonator arrays. , 2013, Analytical chemistry.

[53]  I. Tothill,et al.  Electrochemical immunochip sensor for aflatoxin M1 detection. , 2009, Analytical chemistry.

[54]  M. Casalboni,et al.  Hybrid-Waveguide Ring Resonator for Biochemical Sensing , 2017, IEEE Sensors Journal.

[55]  K. Petermann,et al.  TDM-controlled ring resonator arrays for fast, fixed-wavelength optical biosensing. , 2018, Optics express.

[56]  Yonathan Dattner,et al.  Enhanced Sensitivity of Subwavelength Multibox Waveguide Microring Resonator Label-Free Biosensors , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[57]  B. Szelag,et al.  Hybrid III-V/Si DFB laser integration on a 220 mm fully CMOS-compatible silionn photonlcsplotform , 2017, 2017 IEEE International Electron Devices Meeting (IEDM).

[58]  L. Chrostowski,et al.  Silicon Photonics Design: From Devices to Systems , 2015 .

[59]  Ryan C Bailey,et al.  Rapid, multiparameter profiling of cellular secretion using silicon photonic microring resonator arrays. , 2011, Journal of the American Chemical Society.

[60]  Daoxin Dai,et al.  Highly sensitive digital optical sensor based on cascaded high-Q ring-resonators. , 2009, Optics express.

[61]  Odile Liboiron-Ladouceur,et al.  Responsivity optimization of a high-speed germanium-on-silicon photodetector. , 2016, Optics express.

[62]  Matthew S. Luchansky,et al.  Silicon photonic microring resonators for quantitative cytokine detection and T-cell secretion analysis. , 2010, Analytical chemistry.

[63]  Xi Jiang,et al.  An organophosphonate strategy for functionalizing silicon photonic biosensors. , 2012, Langmuir : the ACS journal of surfaces and colloids.

[64]  Q. Guo,et al.  Determination of aflatoxin M1 in milk by triple quadrupole liquid chromatography-tandem mass spectrometry , 2010, Food additives & contaminants. Part A, Chemistry, analysis, control, exposure & risk assessment.

[65]  N. Nishiyama,et al.  Optical transmission between III-V chips on Si using photonic wire bonding. , 2014, Optics express.

[66]  Hongying Zhu,et al.  Refractometric Sensors for Lab-on-a-Chip Based on Optical Ring Resonators , 2007, IEEE Sensors Journal.

[67]  Silvio Pulwer,et al.  Partially slotted silicon ring resonator covered with electro-optical polymer , 2016, Photonics Europe.

[68]  Abraham J. Qavi,et al.  Anti-DNA:RNA antibodies and silicon photonic microring resonators: increased sensitivity for multiplexed microRNA detection. , 2011, Analytical chemistry.

[69]  J. Bowers,et al.  1550-nm InGaAsP multi-quantum-well structures selectively grown on v-groove-patterned SOI substrates , 2017 .

[70]  L. C. Gunn,et al.  Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators. , 2009, Analytical chemistry.

[71]  Jean-Louis Marty,et al.  Development of an Electrochemical Biosensor for the Detection of Aflatoxin M1 in Milk , 2010, Sensors.

[72]  R. Baets,et al.  Multiplexed Antibody Detection With an Array of Silicon-on-Insulator Microring Resonators , 2009, IEEE Photonics Journal.

[73]  Shuren Hu,et al.  Porous silicon ring resonator for compact, high sensitivity biosensing applications. , 2015, Optics express.

[74]  Zhiping Zhou,et al.  On-chip light sources for silicon photonics , 2015, Light: Science & Applications.

[75]  Xue Feng,et al.  Microring bio-chemical sensor with integrated low dark current Ge photodetector , 2015 .

[76]  Mario Nicola Armenise,et al.  High performance SOI microring resonator for biochemical sensing , 2014 .

[77]  Yibin Ying,et al.  Gold Nanoparticle-Based Terahertz Metamaterial Sensors: Mechanisms and Applications , 2016 .

[78]  Vishnu Priye,et al.  Glucose Sensing Using Slot Waveguide-Based SOI Ring Resonator , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[79]  R. Baets,et al.  Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. , 2007, Optics express.

[80]  Albert V. Davydov,et al.  Immobilization of streptavidin on 4H-SiC for biosensor development , 2012 .

[81]  R Schmogrow,et al.  Photonic wire bonding: a novel concept for chip-scale interconnects. , 2012, Optics express.

[82]  M. Goudarzi,et al.  Determination of Aflatoxin M1 Levels in Produced Pasteurized Milk in Ahvaz City by Using HPLC , 2012, Jundishapur journal of natural pharmaceutical products.

[83]  Adam L. Washburn,et al.  Quantitative, label-free detection of five protein biomarkers using multiplexed arrays of silicon photonic microring resonators. , 2010, Analytical chemistry.

[84]  Ibtisam E. Tothill,et al.  Biosensors and nanomaterials and their application for mycotoxin determination , 2011 .

[85]  W. Knoll,et al.  Long range surface plasmon-enhanced fluorescence spectroscopy for the detection of aflatoxin M1 in milk. , 2009, Biosensors & bioelectronics.

[86]  Ángel Maquieira,et al.  Experimental Study of the Oriented Immobilization of Antibodies on Photonic Sensing Structures by Using Protein A as an Intermediate Layer , 2018, Sensors.

[87]  Aleksandar Nesic,et al.  Hybrid integration of silicon photonics circuits and InP lasers by photonic wire bonding , 2018, Optica.

[88]  Claus Villringer,et al.  Silicon-on-insulator slot-waveguide design trade-offs , 2015, 2015 International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS).

[89]  S. Bhansali,et al.  Extreme sensitive metasensor for targeted biomarkers identification using colloidal nanoparticles-integrated plasmonic unit cells. , 2018, Biomedical optics express.