论文信息 - Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service - 字舞流文

Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service

Mona E. Zaghloul | W. Hansford | V. C. Tyree | Michael Gaitan | Janet M. Cassard | J. I. Pi | Donald B. Novotny | C. Pina | M. Zaghloul | J. Cassard | M. Gaitan | D. Novotny | V. Tyree | J. Pi | C. Pina | W. Hansford