The interaction of particulates formed in an argon RF discharge containing 1-5% CCl/sub 2/F/sub 2/ admixture with a pulsed infrared laser (Nd:YAG, intensity /spl sim/10/sup 9/ W m/sup /spl minus/2/, pulse duration /spl sim/10/sup /spl minus/4/ s) has been studied in situ. The white light emitted during this process has been monitored as a function of time and wavelength using a fast photo diode and an optical multichannel analyser. The spectra have been fitted with blackbody curves with a standard deviation of 5%. A spectral temperature of about 3500 K has been obtained for various plasma conditions and attributed to the decomposition temperature of the particulate material. A model based on laser heating, internal heat conduction and chemical decomposition is compared with the experimental results. This model predicts the time constants for heating and decomposition of the particulates and explains the dependence of the measured emission intensity on the laser intensity. >
[1]
G. Kroesen,et al.
Infrared spectroscopy of a dusty RF plasma
,
1994
.
[2]
G. Kroesen,et al.
Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation
,
1993
.
[3]
D. Geohegan.
Imaging and blackbody emission spectra of particulates generated in the KrF‐laser ablation of BN and YBa2Cu3O7−x
,
1993
.
[4]
G. Selwyn.
Plasma particulate contamination control. I: Transport and process effects
,
1991
.
[5]
A. Bouchoule,et al.
Particle generation and behavior in a silane‐argon low‐pressure discharge under continuous or pulsed radio‐frequency excitation
,
1991
.
[6]
J. Mullen,et al.
Time-resolved emission from laser-ablated uranium
,
1991
.
[7]
Gary S. Selwyn,et al.
In situ laser diagnostic studies of plasma‐generated particulate contamination
,
1989
.