Residual stress measurement in thin films using a slitting method with geometric phase analysis under a dual beam (FIB/SEM) system
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Xianglu Dai | Huimin Xie | Jianguo Zhu | Aizi Jin | A. Jin | Jianguo Zhu | Ronghua Zhu | Ronghua Zhu | X. Dai | H. Xie
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