Recent advances over the last several years in III-V strained-layer superlattice-based infrared detectors have lead this material system to emerge as a solid alternative to HgCdTe for dual-band focal plane arrays (FPAs). Rapid development of superlattice-based detectors has been realized by capitalizing on mature, III-V foundry-compatible processing. Furthermore, superlattice-based epitaxial wafers exhibit a high degree of lateral uniformity with low macroscopic defect densities (< 50 cm-2) and can achieve dark current levels comparable to HgCdTe detectors. In this paper, we review our recent efforts towards producing HD-format (1280x720, 12 μm pitch) superlattice-based, dual-band MWIR/LWIR FPAs. For a representative FPA, characterization was conducted in a pour-fill dewar at 80K, f/3 and using a blackbody range of 22°C to 32°C. For the MWIR band, the noise equivalent temperature difference (NETD) was 14.9 mK with a 3x median NETD operability of 99.91%. For the LWIR band, the median NETD was 28.1 mK with a 3x median NETD operability of 99.66%. To illustrate the manufacturability of superlattice technology, we will present results on 1280x720, 12 μm pitch MWIR/LWIR FPAs built over the last year at HRL through multiple fabrication lots utilizing 4" epiwafers.
[1]
Yajun Wei,et al.
Type II InAs/GaSb superlattice photovoltaic detectors with cutoff wavelength approaching 32 μm
,
2002
.
[2]
Rajesh D. Rajavel,et al.
Advances in III-V based dual-band MWIR/LWIR FPAs at HRL
,
2017,
Defense + Security.
[3]
Yajun Wei,et al.
Advanced InAs/GaSb superlattice photovoltaic detectors for very long wavelength infrared applications
,
2002
.
[4]
L. Esaki,et al.
A new semiconductor superlattice
,
1977
.
[5]
Michael Kattner,et al.
Large-format multi-wafer production of 5" GaSb-based photodetectors by molecular beam epitaxy
,
2017,
Defense + Security.
[6]
Manijeh Razeghi,et al.
InAs/InAs1−xSbx type-II superlattices for high performance long wavelength infrared detection
,
2014
.
[7]
Manijeh Razeghi,et al.
Bias-selectable dual-band mid-/long-wavelength infrared photodetectors based on InAs/InAs1−xSbx type-II superlattices
,
2015
.
[8]
Yajun Wei,et al.
Modeling of type-II InAs/GaSb superlattices using an empirical tight-binding method and interface engineering
,
2004
.