Realize the operating conditions of a manufacturing plant are essential for providing corresponding actions respo nsively. This is because all processes are interrelated and a sma ll fluctuation can affect overall performance in such a dynamic sy stem. Presently, substantial integrations in both the har dware and the software are required to monitor the fabrication pr ocesses. More importantly, the decision model to interpretin g the information from the associated monitoring devices is usually a great challenge due to its complexity and great var iety for different cases. To overcome this integration bottl eneck, we propose an alternative method. The concept is to tr eat the plant as a whole and with the help of identical counting facilities; both the quantitative and qualitative issues at the plan t can be reflected. Simulations have been employed to verify the results and it showed that with the assistance of the propo sed technique, problematic locations could be identified when the plant was operating.
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