Thick-film/MEMS hybrid sensors

This paper will provide a review of the latest advances in thick-film sensors and demonstrate how the technology can be combined with MicroElectroMechanical Systems (MEMS) to produce robust and cost-effective solutions to sensing problems. A brief history of the technologies will be presented and examples of devices will be shown. The feasibility of combining the two technologies will also be discussed and some of the advantages and problems will be described.