MEMS (Micro-electromechanical System) digital geophone

The invention relates to an MEMS (Micro-electromechanical System) digital geophone, which is used for solving the problem that the existing geophone has poor sensitivity and capacity of resisting disturbance, and comprises six units, i.e., an MEMS seismic sensor, a weak signal detection and feedback circuit, a digitization unit, a control circuit, a data communication unit and a supply circuit, wherein the MEMS seismic sensor is used for collecting a seismic signal; the weak signal detection and feedback circuit is used for low noise capacitance signal amplification and force feedback simulation; the digitization unit is used for converting a simulated seismic signal from the weak signal detection and feedback circuit into a digital signal; the control circuit is used for controlling the digitization unit, the communication unit and the supply circuit; the data communication unit is used for receiving a host system control command and completing uploading of the collected data; and the supply circuit is used for supplying power to the above five units. The MEMS seismic sensor and the weak signal detection and feedback circuit are directly connected and integrated. The control circuit is an embedded type CPU (Central Processing Unit). The MEMS seismic sensor is of a three-layer silicon wafer sandwich structure and is manufactured by adopting two-sided beam mass block structure uniwafers with eight beams support and vertical symmetry. The MEMS digital geophone has the advantages of light weight, small size, high sensitivity, fast response speed, wide frequency band, large dynamic range, small distortion, strong small signal identification capacity and capacity of resisting disturbance, and good reliability.