An Analysis of the Elastic Deformation of an Electrostatic Microactuator

[1]  R. L. Edwards,et al.  Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[2]  Terunobu Akiyama,et al.  Controlled stepwise motion in polysilicon microstructures , 1993 .

[3]  T. Tsuchiya,et al.  Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[4]  Hiroyuki Fujita,et al.  Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS , 1997 .