Abstract We have examined a fabrication process of low surface resistance (Rs) YBa 2 Cu 3 O 7− δ (YBCO) films on CeO 2 /Al 2 O 3 substrates by a laser ablation technique. The surface morphology of CeO 2 films depended on the film thickness of CeO 2 . A critical value of the CeO 2 film thickness at ∼90 nm was found above which the surface roughness increased abruptly. The Rs of YBCO films also depended on the surface morphology of CeO 2 films. The Rs value of YBCO films on thinner CeO 2 films ( 2 films (>90 nm). We have also examined the high-temperature superconducting (HTS) antenna as one of the HTS passive devices, and measured the power handling capability. The compact cooling system for HTS patch antenna was constructed.