A new digital silicon MEMS gyroscope

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

[1]  Xiaosheng Wu,et al.  Micromachined rotating gyroscope with electromagnetically levitated rotor , 2006 .

[2]  Lifeng Wu,et al.  The study of the scale factor of micro-machined gyroscope , 2008, IEICE Electron. Express.

[3]  Nan Zhang,et al.  The Structure Principle of silicon Micromachined Gyroscope Driven by the Rotating Carrier , 2005, Int. J. Inf. Acquis..

[4]  Yong-Kweon Kim,et al.  A planar vibratory gyroscope using electromagnetic force , 1998 .

[5]  S. O. Choi,et al.  Dual-axis microgyroscope with closed-loop detection , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[6]  Vikrant Bhadbhade,et al.  A novel piezoelectrically actuated flexural/torsional vibrating beam gyroscope , 2008 .

[7]  M. Gretillat,et al.  Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation , 1999 .

[8]  N. Wakatsuki,et al.  A tubular piezoelectric vibrator gyroscope , 2006, IEEE Sensors Journal.