Improved Heat Spreading Performance of Functionalized Graphene in Microelectronic Device Application

It is demonstrated that a graphene-based film (GBF) functionalized with silane molecules strongly enhances thermal performance. The resistance temperature detector results show that the inclusion of silane molecules doubles the heat spreading ability. Furthermore, molecular dynamics simulations show that the thermal conductivity () of the GBF increased by 15%-56% with respect to the number density of molecules compared to that with the nonfunctionalized graphene substrate. This increase in is attributed to the enhanced in-plane heat conduction of the GBF, resulting from the simultaneous increase of the thermal resistance between the GBF and the functionalized substrate limiting cross-plane phonon scattering. Enhancement of the thermal performance by inserting silane-functionalized molecules is important for the development of next-generation electronic devices and proposed application of GBFs for thermal management.

[1]  G. A. Slack,et al.  Anisotropic Thermal Conductivity of Pyrolytic Graphite , 1962 .

[2]  X. Ruan,et al.  Molecular dynamics simulations of thermal conductivity and spectral phonon relaxation time in suspended and supported graphene , 2011, 1111.4613.

[3]  Shih-Kai Chien,et al.  Influence of hydrogen functionalization on thermal conductivity of graphene: Nonequilibrium molecular dynamics simulations , 2011 .

[4]  E. Plueddemann.  Other Applications of Silane Coupling Agents , 1991 .

[5]  R. Agaiby,et al.  Insight Into the Aggravated Lifetime Reliability in Advanced MOSFETs With Strained-Si Channels on SiGe Strain-Relaxed Buffers Due to Self-Heating , 2008, IEEE Transactions on Electron Devices.

[6]  J. Berg,et al.  Thin-Film Thermal Conductivity Measurement Using Microelectrothermal Test Structures and Finite-Element-Model-Based Data Analysis , 2007, Journal of Microelectromechanical Systems.

[7]  Hafez Raeisi Fard,et al.  Large‐Area Freestanding Graphene Paper for Superior Thermal Management , 2014, Advanced materials.

[8]  Teng Wang,et al.  A complete carbon-nanotube-based on-chip cooling solution with very high heat dissipation capacity , 2012, Nanotechnology.

[9]  P. Avouris,et al.  Thermal infrared emission from biased graphene. , 2010, Nature nanotechnology.

[10]  A. Balandin,et al.  Heat Removal in Silicon-on-Insulator Integrated Circuits With Graphene Lateral Heat Spreaders , 2009, IEEE Electron Device Letters.

[11]  Min Han,et al.  Improved heat dissipation in gallium nitride light-emitting diodes with embedded graphene oxide pattern , 2013, Nature Communications.

[12]  Baowen Li,et al.  Ultracompact interference phonon nanocapacitor for storage and lasing of coherent terahertz lattice waves. , 2015, Physical review letters.

[13]  J. Grossman,et al.  Thermal transport in functionalized graphene. , 2012, ACS nano.

[14]  J. Kysar,et al.  Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene , 2008, Science.

[15]  D. Go,et al.  Thermal Transport in Graphene Oxide – From Ballistic Extreme to Amorphous Limit , 2014, Scientific Reports.

[16]  Liwei Liu,et al.  Ultrahigh Thermal Conductivity of Assembled Aligned Multilayer Graphene/Epoxy Composite , 2014 .

[17]  H. Riel,et al.  Length-dependent thermal transport along molecular chains. , 2014, Physical review letters.

[18]  Robert M. Pasternack,et al.  Attachment of 3-(Aminopropyl)triethoxysilane on silicon oxide surfaces: dependence on solution temperature. , 2008, Langmuir : the ACS journal of surfaces and colloids.

[19]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[20]  Huaqing Xie,et al.  Measuring the thermal conductivity of a single carbon nanotube. , 2005, Physical review letters.

[21]  Y. Chalopin,et al.  Significant thickness dependence of the thermal resistance between few layer graphenes , 2013 .

[22]  Tian Gao,et al.  Research on Heat Sink for LED Stage Lighting Lamp , 2013 .

[23]  Jie Jin,et al.  Preparation and characterisation of covalent polymer functionalized graphene oxide , 2011 .

[24]  K. Novoselov,et al.  Thermal conductivity of graphene laminate. , 2014, Nano letters.

[25]  C. N. Lau,et al.  Superior thermal conductivity of single-layer graphene. , 2008, Nano letters.

[26]  A. Balandin.  Thermal properties of graphene and nanostructured carbon materials. , 2011, Nature materials.

[27]  H K Ma,et al.  Study of an LED device with a honeycomb heat sink , 2010, 2010 26th Annual IEEE Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM).

[28]  E. Pop,et al.  Thermal properties of graphene: Fundamentals and applications , 2012, 1301.6181.

[29]  G. A. Slack,et al.  Thermal Conductivity of Pure and Impure Silicon, Silicon Carbide, and Diamond , 1964 .

[30]  Guanxiong Liu,et al.  Graphene quilts for thermal management of high-power GaN transistors. , 2012, Nature communications.

[31]  Bei Wang,et al.  Advanced mechanical properties of graphene paper , 2011 .

[32]  K. Wu,et al.  Self-heating effect in FinFETs and its impact on devices reliability characterization , 2014, 2014 IEEE International Reliability Physics Symposium.

[33]  Li Shi,et al.  Two-Dimensional Phonon Transport in Supported Graphene , 2010, Science.

[34]  Kenneth E. Goodson,et al.  Phonon scattering in silicon films with thickness of order 100 nm , 1999 .

[35]  N. Pu,et al.  Dispersion of graphene in aqueous solutions with different types of surfactants and the production of graphene films by spray or drop coating , 2012 .

[36]  Chia-Pin Chiu,et al.  Cooling a Microprocessor Chip , 2006, Proceedings of the IEEE.

[37]  N. Peres,et al.  Fine Structure Constant Defines Visual Transparency of Graphene , 2008, Science.

[38]  Jiali Zhang,et al.  Reduction of graphene oxide via L-ascorbic acid. , 2010, Chemical communications.

[39]  Michael W. Austin,et al.  Development of multi-functional sensors in thick-film and thin-film technology , 2000 .

[40]  Huafeng Yang,et al.  Covalent functionalization of polydisperse chemically-converted graphene sheets with amine-terminated ionic liquid. , 2009, Chemical communications.

[41]  M. Yuen,et al.  Thermal chemical vapor deposition grown graphene heat spreader for thermal management of hot spots , 2013 .

[42]  Lain-Jong Li,et al.  Efficient heat dissipation of photonic crystal microcavity by monolayer graphene. , 2013, ACS nano.

[43]  Jong-Hyun Ahn,et al.  Graphene-Based Heat Spreader for Flexible Electronic Devices , 2014, IEEE Transactions on Electron Devices.

[44]  O. Semenov,et al.  Impact of self-heating effect on long-term reliability and performance degradation in CMOS circuits , 2006, IEEE Transactions on Device and Materials Reliability.

[45]  M. Asheghi,et al.  Thermal and electrical characterization of Cu/CoFe superlattices , 2004 .

[46]  Thermal characterization of power devices using graphene-based film , 2014, 2014 IEEE 64th Electronic Components and Technology Conference (ECTC).

[47]  A. Majumdar,et al.  Thermal conductance and thermopower of an individual single-wall carbon nanotube. , 2005, Nano letters.

[48]  Krisztian Kordas,et al.  Chip cooling with integrated carbon nanotube microfin architectures , 2007 .