Micromirror arrays for coherent beam steering and phase control

Micromirror arrays have been designed, fabricated, and tested that can steer coherent beams and that can simultaneously implement continuous phase control for beam shaping or aberration correction. A typical micromirror consists of a polysilicon plate (metalized for reflection) that is less than 100 microns in maximum dimension. Each micromirror is suspended a few microns above a polysilicon electrode by flexure hinges, and potentials of less than 50 volts applied to the electrodes displace the micromirrors over continuous ranges. Applications for arrays of these micromirrors include adaptive optics, active optical interconnections, and laser radar and communications.