Selective Pick-and-Place of Thin Film by Robotic Micromanipulation

Micro-engineering is increasingly interested in the use of thin films with thicknesses of less than 20nm. Before integrating these promising materials into complex Nano Electro Mechanical Systems NEMS, their properties must be characterized. They must be transferred onto specific substrates for analysis. Current manipulation techniques are not suitable for the transfer of these thin films as they do not allow selection of the parts of the object that must be manipulated, and the quality of the sample is altered by traces of chemical residues. To perform the transfer of a selected thin film without modifying its properties, this paper presents a novel approach based on local gluing. This method has been validated by experiments performed on graphite films. Successful transfers of thin films of 4.2 × 4.7 µm2 to 70 × 12 µm2 with an estimated thickness of between 10 and 40 layers have been demonstrated. Limits of this technique are discussed.

[1]  K. Novoselov,et al.  Macroscopic graphene membranes and their extraordinary stiffness. , 2008, Nano letters.

[2]  P. Campbell,et al.  Techniques for the Dry Transfer of Epitaxial Graphene onto Arbitrary Substrates , 2009, ACS nano.

[3]  Scott S. Verbridge,et al.  Electromechanical Resonators from Graphene Sheets , 2007, Science.

[4]  Kwang S. Kim,et al.  Roll-to-roll production of 30-inch graphene films for transparent electrodes. , 2010, Nature nanotechnology.

[5]  A. M. van der Zande,et al.  Impermeable atomic membranes from graphene sheets. , 2008, Nano letters.

[6]  A. Ashkin.  Acceleration and trapping of particles by radiation pressure , 1970 .

[7]  Philip Kim,et al.  Fabrication and electric-field-dependent transport measurements of mesoscopic graphite devices , 2004, cond-mat/0410314.

[8]  Marc Cahay,et al.  Spin Relaxation Mechanisms in the Organic Semiconductor Alq3 , 2009, Int. J. Nanotechnol. Mol. Comput..

[9]  Francesco Bonaccorso,et al.  Brownian motion of graphene. , 2010, ACS nano.

[10]  N. Chaillet,et al.  Microrobotics for Micromanipulation: Chaillet/Microrobotics for Micromanipulation , 2013 .

[11]  Hiroshi Watabe,et al.  Pharmacokinetic Challenges against Brain Diseases with PET , 2011 .

[12]  G. Eda,et al.  Graphene-based composite thin films for electronics. , 2009, Nano letters.

[13]  R. Piner,et al.  Transfer of large-area graphene films for high-performance transparent conductive electrodes. , 2009, Nano letters.

[14]  Alfredo Pasquarello,et al.  Metal adatoms on graphene and hexagonal boron nitride: Towards rational design of self-assembly templates , 2010, 1007.1704.

[15]  M. Batzill,et al.  Graphene destruction by metal-carbide formation: An approach for patterning of metal-supported graphene , 2010 .

[16]  I. Fassi,et al.  Development of a gripping system based on capillary force , 2005, (ISATP 2005). The 6th IEEE International Symposium on Assembly and Task Planning: From Nano to Macro Assembly and Manufacturing, 2005..

[17]  Y. Kopelevich,et al.  Effect of oxygen adsorption on magnetic properties of graphite , 2011, 1106.5565.

[18]  Gilgueng Hwang,et al.  Graphene as thin film infrared optoelectronic sensor , 2009, 2009 International Symposium on Optomechatronic Technologies.

[19]  D. Boukhvalov,et al.  First‐principles modeling of the interactions of iron impurities with graphene and graphite , 2010, 1011.1950.

[20]  M. I. Katsnelson,et al.  Destruction of graphene by metal adatoms , 2009 .

[21]  J. Rogers,et al.  Layer-by-layer Transfer of Multiple, Large Area Sheets of Graphene Grown in Multilayer Stacks on a Single Sic Wafer Keywords: Graphene · Silicon Carbide · Epitaxial Growth · Transfer Technique · Layer-by-layer · Four-point Measurement , 2022 .

[22]  J. Kysar,et al.  Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene , 2008, Science.

[23]  Javed Mazher,et al.  Graphene made easy: High quality, large-area samples , 2009 .

[24]  Nazrul Islam.  Trends in Nanotechnology Knowledge Creation and Dissemination , 2011, Int. J. Nanotechnol. Mol. Comput..

[25]  SUPARNA DUTTASINHA,et al.  Graphene: Status and Prospects , 2009, Science.

[26]  Boris Galabov,et al.  Electrostatic Potential at Nuclei: An Accurate Reactivity Descriptor for Organic Compounds , 2012 .

[27]  R. Cohn,et al.  Electrostatic deposition of graphene , 2007, Nanotechnology.

[28]  Feng Wang,et al.  A direct transfer of layer-area graphene , 2010 .

[29]  Hisato Yamaguchi,et al.  Highly uniform 300 mm wafer-scale deposition of single and multilayered chemically derived graphene thin films. , 2010, ACS nano.