Electrostatic charge distribution in the dielectric layer of alumina electrostatic chuck

Electrostatic charge and its distribution in the dielectric layer of TiO2- and Cr2O3-added alumina electrostatic chucks has been studied. The electrostatic potential was evaluated at various applied voltages by an electrostatic potential meter and it demonstrated the existence of charges with opposite polarities. Direct SEM observation and toner development of the charged ceramic surface was carried out to clarify the charge distribution. The charge contrast was not uniform on the ceramic microstructure and the charge was distributed in the form of grains. Taking into consideration these results, the relationship between electrostatic charge distribution and ceramic microstructure is discussed.

[1]  K. Metcalfe.  Liquid developers for xerography , 1955 .

[2]  Kunihiro Nagata,et al.  Effects of Grain Size and Porosity on Electrical and Optical Properties of PLZT Ceramics , 1973 .

[3]  J. Hirsch,et al.  Contact-injected space charge in pet , 1981 .

[4]  R. Mendiratta,et al.  A Study of Absorption Currents in Polycarbonate:Polypropylene Blend , 1983 .

[5]  B. Jiménez,et al.  Ageing of (Pb, La)(Zr, Ti)O3 ferroelectric ceramics and the space charge arising on hot poling , 1984 .

[6]  M. Ieda,et al.  Effects of space charge on electrical conduction in high-density polyethylene , 1985 .

[7]  S. Lang,et al.  Spatial distributions of polarization and space charge in tin-substituted lead zirconate titanate ceramics using laser intensity modulation method (LIMM) , 1987 .

[8]  K. Tsuda,et al.  Characterization of the Interface States in ZnO Varistors by DLTS Method , 1989 .

[9]  M. Takata,et al.  Detection and Characterization of Trap Centers in ZnO Varistor by ICTS , 1989 .

[10]  J. Tanaka,et al.  Capacitance-Voltage Characteristics of ZnO Varistors and the Role of Dopants , 1989 .

[11]  Y. Xi,et al.  Space charge distribution measurement of PLZT ceramics , 1990 .

[12]  H. Nemoto.  Charge‐Up Scanning Electron Microscopy Images of Intergranular Phases in Semiconducting BaTiO3 Positive Temperature Coefficient of Resistivity Ceramics , 1991 .

[13]  T. Watanabe,et al.  Effect of Additives on the Electrostatic Force of Alumina Electrostatic Chucks , 1992 .

[14]  Tetsuo Kitabayashi,et al.  Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck , 1992 .