Confocal surface profiling utilizing chromatic aberration

A new method for surface profiling in the confocal microscope utilizing chromatic aberration is presented. An expression for the integrated spectral intensity in the new profilometer is derived and chromatic aberration in the confocal microscope is explained. Estimates of the minimum resolvable depth and the maximum depth that can be profiled are given utilizing a ratiometric signal detection scheme. Examples of ratio images illustrating the new surface profiling technique are presented, showing the scheme to be both simple to implement and effective.

[1]  T C Strand,et al.  Angstrom resolution optical profilometry for microscopic objects. , 1987, Applied optics.

[2]  Giuseppe Molesini,et al.  Chromatic Probe For Surface Microtopography Inspection And Analysis , 1989, Other Conferences.

[3]  Yeshaiahu Fainman,et al.  Optical profilometer: a new method for high sensitivity and wide dynamic range. , 1982, Applied optics.

[4]  D Y Lou,et al.  Surface profile measurement with a dual-beam optical system. , 1984, Applied optics.

[5]  Y Fainman,et al.  Optical polar profilometer: an analyzer of circularly symmetric surfaces. , 1986, Applied optics.

[6]  R J Pieper,et al.  Image processing for extended depth of field. , 1983, Applied optics.

[7]  Y Ichioka,et al.  Digital composition of images with increased depth of focus considering depth information. , 1985, Applied optics.

[8]  J S Courtney-Pratt,et al.  Microscope with enhanced depth of field and 3-d capability. , 1973, Applied optics.

[9]  G. Pedrini,et al.  Focus-wavelength encoded optical profilometer , 1984 .

[10]  D. K. Hamilton,et al.  Three-dimensional surface measurement using the confocal scanning microscope , 1982 .

[11]  Y. Ichioka,et al.  Digitized optical microscopy with extended depth of field. , 1989, Applied optics.

[12]  Kimiyuki Mitsui,et al.  Development Of A High Resolution Sensor For Surface Roughness , 1988 .

[13]  G E Sommargren,et al.  Optical heterodyne profilometry. , 1981, Applied optics.

[14]  Colin J. R. Sheppard,et al.  Optical microscopy with extended depth of field , 1983, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[15]  Giuseppe Molesini,et al.  Longitudinal Chromatic Aberration Spectroscope , 1986, Other Conferences.

[16]  M. Downs.  Problems associated with thin film measurement using double beam interference microscopy , 1981 .

[17]  G Makosch,et al.  Surface profile measurement with a scanning differential ac interferometer. , 1984, Applied optics.

[18]  G. Häusler,et al.  A method to increase the depth of focus by two step image processing , 1972 .

[19]  Tony Wilson,et al.  Surface profile measurement using the confocal microscope , 1982 .

[20]  Bruno Jaggi,et al.  Design of a solid-state microscope , 1989 .

[21]  A Boyde.  Colour‐coded stereo images from the tandem scanning reflected light microscope (TSRLM) , 1987, Journal of microscopy.

[22]  F. Quercioli,et al.  An optical probe based on spherical aberration for surface figure testing , 1989 .