Apparatus for vacuum processing

The present invention formed therein a vacuum atmosphere and for a vacuum processing apparatus capable of performing a predetermined process on substrates, and more particularly, to having to separate the vacuum chamber to the chamber body and the top cover, the top cover and the chamber It relates to a vacuum processing apparatus which can be easily opened and closed from the main body. The present invention, in the processing apparatus having a top cover provided detachably on the upper portion of the chamber body, the chamber body comprises a gate valve to enable the flow of the substrate, said gate opposite to the valve arrangement direction of the upper cover a horizontal driving unit for horizontally movably supported in a direction; The left the top cover is disposed between the both sides of the upper cover can be driven up and down, and horizontally moving the top cover moving frame to provide a path of the horizontal driving unit; Is at predetermined intervals coupled to the spaced condition on the lower side a plurality point of the top cover moving frame, a plurality of lift driving unit for lifting the top cover moving frame and a top cover in a vertical direction; provides a vacuum processing apparatus including a. A vacuum processing apparatus, a flat panel display element manufacturing apparatus, a top cover, a chamber body