论文信息 - Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb - 字舞流文

Inductively coupled plasma etching of high aspect ratio two-dimensional photonic crystals in Al-rich AlGaAs and AlGaAsSb

A. Larrue | O. Gauthier-Lafaye | A. Monmayrant | P. Dubreuil | F. Lozes-Dupuy | D. Belharet | S. Bonnefont | S. Moumdji