论文信息 - Micromachined deformable mirrors for adaptive optics

Micromachined deformable mirrors for adaptive optics

Recent progress on deformable mirror systems made at Boston University and Boston Micromachines Corporation is described. The mirror's optical, electrical, and mechanical performance characteristics are summarized, and the effects of air damping on performance are described. Two applications that have employed the μDM in laser communications and retinal imaging are introduced.

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