论文信息 - Atomic layer deposition and characterization of Ga-doped ZnO thin films - 字舞流文

Atomic layer deposition and characterization of Ga-doped ZnO thin films

H. Makino | H. Hirayama | Tetsuya Yamamoto | S. Kishimoto | N. Horiuchi | K. Saito | Y. Hiratsuka | A. Omata